Chamber Parts
- Clamp Ring
- Collimator
- Depo Shield
- Exhaust Plate
- Shower Head
- Shutter
- Dome
- Top Plate
- Other
- Upper Electrode
- Cover Ring
- Inner Cel
- Si-Gnd
- Outer Cel
- Focus Ring
Most Viewed
PLATE(T5)
Price US $500
Delivery Ship within 10 DAYS after payment received
Warranty No warranty
Condition 2nd: Used As-Is, Unknown
ESC HOLD SHIELD 300H
Price US $500
Delivery Ship within 10 DAYS after payment received
Warranty 30 DAYS after shipped
Condition 2nd: Used Refurbished by 3rd party
CH QUARTZ SHIELD(1201)
Price US $500
Delivery Ship within 10 DAYS after payment received
Warranty No warranty
Condition 2nd: Used As-Is, Unknown
New Products
RING,EDGE,TOP,WIDE
Price US $548
Delivery Ship within 10 DAYS after payment received
Warranty No warranty
Condition OEM: (OPM) New
AMAT 0020-71314 Gear Clamp Ring, 100500
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0020-24719 Cover Ring 8" 101 AL Coverage 424168
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0020-22237 Cover Ring, 8" 424121
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0020-22237 Cover Ring, 8" 424118
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0020-22237 Cover Ring, 8" 424116
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424104
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424102
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424055
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424052
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424051
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424046
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
TEL, Tokyo Electron, SU03013R, Exposure Shutter Unit, 423057
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0020-24719 Cover Ring 8" 101 AL Coverage, 422963
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0040-09723 Unibody, Etch Chamber w/ .397 Step, Poly Trench, 418269
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Not Working
AMAT 0010-09242, Assembly, Chamber B, TEOS Gas Line.Cables. 419708
Price Ask
Delivery Ship within 30 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-22801, Precision, Plate, Collimator, 1/2 Hex, 1.5:1, SNGLE PC. 419155
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-28190 Rev.410, 19324601, Screw Clamp Ring, Texturing Fixture. 419022
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-33061 Clamp Ring Extension Flag P5000, 418167
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0040-70407 DPS Chamber. Mask Chuck Pedestal, 418155
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: Used As-Is, Unknown
AMAT 0200-35316-P3 Dome Quartz 4.69" DPS 417400
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0200-09893A, Focus Ring 6", FLTD, Lift, 2, 162MM ID. 417386
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-26262 Clamp Ring 6" SMF AL - SFLAT, 417176
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0021-17720 Disk, Shutter,TA/BESC, AL-Sprayed, 0020-04400, 415354
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Refurbished by manufacturer
AMAT 0020-10814 Pedestal, Wafer, Chamber Etch, 402325
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-28510 BLANKOFF, SHUTTER GARAGE 402282
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0021-22012 Disc, Shutter, JMF, 8" E-Chuck 401826
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-36788 PLATTER, CHAMBER, EPI 401729
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0010-09241 Assy Chamber A Teos Gas Line/Cables
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0010-76968 OTF CENTERFINDER EMITTER ASSY, TRANSFER CHAMBER,BANNER SM31ELMHS
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0140-04401 CABLE ASSY, STEELHEAD 0, 300 MM XGEN CHAMBER
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398316
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-22237 Cover Ring 8"
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398276
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398302
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 CLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-22237 COVER RING 8 INCH
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
2 AMAT 0020-13056 Top Cover Chamber Tray D (W/C
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0242-07688 Kit, Chamber A, Integration Lines, ACAP, 3870-01768, 0226-44725
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-81611 Clamp Ring
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0040-52356 Duct, gas panel, chamber left side, toxic FEP
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0010-21348 Assembly, Clear Cover 11" PVD Chamber
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0040-98139 Bellows Assy, MRS/Shutter
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0200-65613 Glass Window Heat Chamber
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
2 AMAT 0020-32034, Vespel Clamp Ring
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0200-09629 Cover Ring, Quartz, 150mm Poly 162mm ID
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0010-10383 Plumb Assy Heated Chamber B-Slot 1 Ver 4.1 0050-10291 0243-75025
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0020-30586 Collimator 200mm, outer shadow ring BWCVD
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition 2nd: Used Working, Untested