Chamber Parts
- Clamp Ring
- Collimator
- Depo Shield
- Exhaust Plate
- Shower Head
- Shutter
- Dome
- Top Plate
- Other
- Upper Electrode
- Cover Ring
- Inner Cel
- Si-Gnd
- Outer Cel
- Focus Ring
Most Viewed
Dome, lower, EPI/HTF 300mm
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Delivery Ship within 10 DAYS after payment received
Warranty No warranty
Condition OEM: (OPM) New
DEPO SHIELD P2
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
200MM UPPER ELECTRODE Y2O3-T TEL# 1D10-204338-13
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Delivery Ship within 7 DAYS after payment received
Warranty 0 DAYS after shipped
Condition OEM: (OPM) New
New Products
Dome, lower, EPI/HTF 300mm
Price Ask
Delivery Ship within 10 DAYS after payment received
Warranty No warranty
Condition OEM: (OPM) New
AMAT 0200-09547 Ceramic Clamp Ring, 200MM, 194MM, Notch, 102653
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0042-12952 Showerhead, 102560
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Not Working
AMAT Shower Head, Perf Plate, Endura HP PVD, 102123
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-71314 Gear Clamp Ring, 100500
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-24719 Cover Ring 8" 101 AL Coverage 424168
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0020-22237 Cover Ring, 8" 424121
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-22237 Cover Ring, 8" 424118
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-22237 Cover Ring, 8" 424116
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424104
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424102
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424055
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424052
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424051
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0021-35869 Shower Head, Perf Plate TxZ 424046
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
TEL, Tokyo Electron, SU03013R, Exposure Shutter Unit, 423057
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-24719 Cover Ring 8" 101 AL Coverage, 422963
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0040-09723 Unibody, Etch Chamber w/ .397 Step, Poly Trench, 418269
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Not Working
AMAT 0010-09242, Assembly, Chamber B, TEOS Gas Line.Cables. 419708
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Delivery Ship within 30 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-22801, Precision, Plate, Collimator, 1/2 Hex, 1.5:1, SNGLE PC. 419155
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-28190 Rev.410, 19324601, Screw Clamp Ring, Texturing Fixture. 419022
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-33061 Clamp Ring Extension Flag P5000, 418167
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0040-70407 DPS Chamber. Mask Chuck Pedestal, 418155
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: Used As-Is, Unknown
AMAT 0200-35316-P3 Dome Quartz 4.69" DPS 417400
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0200-09893A, Focus Ring 6", FLTD, Lift, 2, 162MM ID. 417386
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-26262 Clamp Ring 6" SMF AL - SFLAT, 417176
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0021-17720 Disk, Shutter,TA/BESC, AL-Sprayed, 0020-04400, 415354
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used Working, Untested
AMAT 0020-10814 Pedestal, Wafer, Chamber Etch, 402325
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-28510 BLANKOFF, SHUTTER GARAGE 402282
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0021-22012 Disc, Shutter, JMF, 8" E-Chuck 401826
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-36788 PLATTER, CHAMBER, EPI 401729
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0010-09241 Assy Chamber A Teos Gas Line/Cables
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0010-76968 OTF CENTERFINDER EMITTER ASSY, TRANSFER CHAMBER,BANNER SM31ELMHS
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
AMAT 0140-04401 CABLE ASSY, STEELHEAD 0, 300 MM XGEN CHAMBER
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398316
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-22237 Cover Ring 8"
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398276
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398302
Price Ask
Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-26115 CLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
NEW AMAT 0020-22237 COVER RING 8 INCH
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
2 AMAT 0020-13056 Top Cover Chamber Tray D (W/C
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0242-07688 Kit, Chamber A, Integration Lines, ACAP, 3870-01768, 0226-44725
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0020-81611 Clamp Ring
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New
AMAT 0040-52356 Duct, gas panel, chamber left side, toxic FEP
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0010-21348 Assembly, Clear Cover 11" PVD Chamber
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0040-98139 Bellows Assy, MRS/Shutter
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
AMAT 0200-65613 Glass Window Heat Chamber
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Delivery Ship within 3 DAYS after payment received
Warranty 14 DAYS after received
Condition OEM: New
2 AMAT 0020-32034, Vespel Clamp Ring
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Delivery Ship within 3 DAYS after payment received
Warranty No warranty
Condition OEM: New