/ Clean Track ACT-12 / 1C2D, LtoR, Foup Cassette / - / Tokyo Electron
Delivery Ship within 10 DAYS after payment received
Warranty No warranty
Condition OEM: Used As-Is, Unknown
0 available
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- ProcessLITHO
- Wafer size12inch(300mm)
- Delivery ServiceEconomy service (more than 10 business days)
- Payment method
- Item description:
- Confirmed out of stock by LAYLA Support 2022/3/10 (Seller's word)
Main system
1)Main frame with system controller
2) Carrier station
-Type: Foup Cassette Type
-3Cassette
- Uni-cassette system
3) Coater unit
- 6 dispense nozzle with temperature controlled lines for etch unit
- RDS Pump (Millipore)
- Rinse nozzle : back/ EBR / solvent bath for etch unit
- Rinse system : 3 liter 2Tank Buffer tank system
- Degassing system.
- Programmable side rinse for PR nozzle(1, 2, 3, 4, 5, 6)
- 36 bottles(1 bottle/1nozzle) in machine for unit for Thinner supply : CCSS
- AMC Suck-back valve
- Drain: Direct drain
4) Developer unit
- H nozzle(1ea) for each unit
- 1 stream nozzle for DI rinse and 2 points for back side rinse on each unit
- Developer system : 3 liter 2Tank Buffer tank system
- Developer supply: CCSS
- Degassing system
- Developer temperature control system
- Drain: direct drain
5) I/F Wafer Stage Type : NIKON Type(SF13)
6) Adhesion Unit 1EA
- 100% sealing closed chamber(Built-in hot plate)
- HMDS tank with float sensor in system
- HMDS supply : Local bottle
7) Low Temp Hot Plates (LHP) 5EA
8) Chill Plates (CPL) 4EA
9) Precision Chilling Hot Plates (CHP) 4EA
10) TCP Unit 1EA
11) TRS Unit 2EA
12) WEE (wafer edge exposure ) unit 1EA
- UV Sensor : I-line
13) Chemical Cabinet : Solvent , HMDS , DEV Chemical Cabinet
14) Temperature&Humidity controller
- Type: Shinwa Series (ESA-8)
15) TEMP Control Unit(TCU) 1EA
16) AC Power Box - Item spec:
- We can modify to any config. Send me a message.
- Condition Description:
- Packed, Power inspection is impossible
- Shipping Policy:
- Payment Policy:
- Return Policy:
- Delivery Note: