/ Clean Track ACT-12 / 1C2D, LtoR, Foup Cassette / - / Tokyo Electron

/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_01/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_02/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_03/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_04
/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_01
/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_02
/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_03
/Clean Track ACT-12/1C2D, LtoR, Foup Cassette/-/Tokyo Electron_04

Price Ask

Delivery Ship within 10 DAYS after payment received

Warranty No warranty

Condition OEM: Used As-Is, Unknown

1 available

(9) Seller rank

Shipping

  • Process
    LITHO
  • Wafer size
    12inch(300mm)
  • Delivery Service
    Economy service (more than 10 business days)
  • Payment method
    PayPal Bank Transfer
Item description:
Main system

1)Main frame with system controller
2) Carrier station
-Type: Foup Cassette Type
-3Cassette
- Uni-cassette system
3) Coater unit
- 6 dispense nozzle with temperature controlled lines for etch unit
- RDS Pump (Millipore)
- Rinse nozzle : back/ EBR / solvent bath for etch unit
- Rinse system : 3 liter 2Tank Buffer tank system
- Degassing system.
- Programmable side rinse for PR nozzle(1, 2, 3, 4, 5, 6)
- 36 bottles(1 bottle/1nozzle) in machine for unit for Thinner supply : CCSS
- AMC Suck-back valve
- Drain: Direct drain
4) Developer unit
- H nozzle(1ea) for each unit
- 1 stream nozzle for DI rinse and 2 points for back side rinse on each unit
- Developer system : 3 liter 2Tank Buffer tank system
- Developer supply: CCSS
- Degassing system
- Developer temperature control system
- Drain: direct drain
5) I/F Wafer Stage Type : NIKON Type(SF13)
6) Adhesion Unit 1EA
- 100% sealing closed chamber(Built-in hot plate)
- HMDS tank with float sensor in system
- HMDS supply : Local bottle
7) Low Temp Hot Plates (LHP) 5EA
8) Chill Plates (CPL) 4EA
9) Precision Chilling Hot Plates (CHP) 4EA
10) TCP Unit 1EA
11) TRS Unit 2EA
12) WEE (wafer edge exposure ) unit 1EA
- UV Sensor : I-line
13) Chemical Cabinet : Solvent , HMDS , DEV Chemical Cabinet
14) Temperature&Humidity controller
- Type: Shinwa Series (ESA-8)
15) TEMP Control Unit(TCU) 1EA
16) AC Power Box
Item spec:
We can modify to any config. Send me a message.
Condition Description:
Packed, Power inspection is impossible
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