0190-15552W / / GEN RF 13.56MHZ 10KW AE APEX REV J / /

0190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_010190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_020190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_030190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_040190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_050190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_060190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_070190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_080190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_09
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Delivery Ship within 5 DAYS after payment received

Warranty 30 DAYS after shipped

Condition OEM: Used Refurbished by manufacturer

2 available

(47) Seller rank Certified Seller From Japan
  • Process
    CVD
  • Wafer size
    12inch(300mm)
  • Delivery Service
    First class service (1 to 3 business days)
  • Payment method
    PayPal Bank Transfer
Item description:
The versatile Apex family of RF generators provides remarkably high power density and power-delivery consistency. Sophisticated RF conversion technology not only offers enhanced product and process reliability but also increases cost effectiveness by eliminating the need for front-end, DC-to-DC conversion components. Exceptionally fast and sensitive arc-handling technology also increases yield and lowers CoO. For superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing, the Apex platform is the ideal choice. With its unique, modular design-in a package so trim it can be mounted directly on the chamber-the Apex platform is also highly customizable to suit your specific process needs.
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